Oxide Sputtering Targets
Shape we provide: discs, plate, rod, tube, sheet, Delta, and per drawing
Sputtering targets manufacturing method:
Hot pressing (HP), hot / cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering
Spezifications:
Diameter: 355.6mm (14 ") max.
Single piece Size: Length: <500mm, Width: <250mm, Thickness:> 1mm,
If larger size than this, we can do it as tiles joint by 45 degree or 90 degree.
We have only listed popular materials. Please feel free to contact us with any special requirements.
Oxide Sputtering Targets
| Oxide Sputtering | Oxide Sputtering | Oxide Sputtering | |||
|---|---|---|---|---|---|
| Aluminum Oxide | Al2O3 | Indium Zinc Oxide | IZO | Tantalum Pentoxide | Ta2O5 |
| Aluminum Zinc Oxide | Al2O3-ZnO (AZO) | Iron Oxide | Fe2O3 | Terbium Oxide | Tb4O7 |
| Antimony Oxide | Sb2O3 | Lanthanum Oxide | La2O3 | Thulium Oxide | Tm2O3 |
| Barium Titanate | BaTiO3 | Lead Oxide | PbO | Tin Dioxide | Sb: SnO2 (ATO) |
| Bismuth Oxide | Bi2O3 | Lead Zirconate Titanate | PbZrTiO3(PZT) | Titanium Oxide | TiO |
| Cerium Oxide | CeO2 | Lutetium Oxide | Lu2O3 | Titanium Dioxide | TiO2 |
| Chromium Oxide | Cr2O3 | Magnesium Oxide | MgO | Titanium Oxide | Ti2O3 |
| Copper Oxide | CuO | Molybdenum Oxide | MoO3 | Tungsten Oxide | WO3 |
| Dysprosium Oxide | Dy2O3 | Neodymium Oxide | Nd2O3 | Vanadium Oxide | V2O5 |
| Erbium Oxide | Er2O3 | Nickel Oxide | NiO | Ytterbium Oxide | Yb2O3 |
| Europium Oxide | Eu2O3 | Niobium Pentoxide | Nb2O5 | Yttrium oxide | Y2O3 |
| Gadolinium Oxide | Gd2O3 | Praseodymium Oxide | Pr6O11 | Zinc oxide | ZnO |
| Gallium Oxide | Ga2O3 | Samarium Oxide | Sm2O3 | Zirconium oxide | ZrO2 |
| Ga2O3 doped | ZnO (GZO) | Scandium Oxide | Sc2O3 | Zirkonoxid stabilized Yttrium | ZrO2 -Y2O3 stabilized (YSZ) |
| Hafnium Oxide | HfO2 | Silicon dioxide | SiO2 | ||
| Hafnium Yttrium Oxide | HfO2-Y2O3 | Silicon monoxide | SiO | ||
| Holmium Oxide | Ho2O3 | Strontium Titanate | SrTiO3 | ||
| Indium Oxide | In2O3 | Silicon dioxide | SiO2 | ||
| Indium Tin Oxide | ITO |