Fluoride Sputtering Targets


Shape: discs, plate, rod, tube, sheet, Delta, and per drawing 

Specification:

Diameter: 355.6mm (14") max. 355.6mm (14") max. 

Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm, 

Sputtering targets making method: Hot pressing (HP), hot/cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering

If larger size than this is needed, we can also provide tiles joint by 45 degree or 90 degree.


   We have only listed popular materials. Please feel free to contact us with any special requirements.

Fluoride Sputtering Targets

Name Purity
Aluminum Fluoride AlF3 99.9%
Barium Fluoride BaF2 99.99%
Calcium Fluoride CaF2 99.99%
Cerium fluoride CeF3 99.9%,99.99%
Erbium Fluoride ErF3 99.99%
Lanthanum fluoride LaF3 99.99%
Lead Fluoride PbF2 99.99%
Lithium Fluoride LiF 99.99%
Magnesium Fluoride MgF2 99.95%
Nodium Fluoride NaF 99.99%
Ytterbium Fluoride YbF3 99.9%
Yttrium Fluoride YF3 99.9%