Fluoride Sputtering Targets
Shape: discs, plate, rod, tube, sheet, Delta, and per drawing
Specification:
Diameter: 355.6mm (14") max. 355.6mm (14") max.
Single piece Size: Length: <500mm, Width: <250mm, Thickness: >1mm,
Sputtering targets making method: Hot pressing (HP), hot/cold isostatic pressing (HIP, CIP), and vacuum melting, vacuum sintering
If larger size than this is needed, we can also provide tiles joint by 45 degree or 90 degree.
We have only listed popular materials. Please feel free to contact us with any special requirements.
Fluoride Sputtering Targets
Name | Purity | |
---|---|---|
Aluminum Fluoride | AlF3 | 99.9% |
Barium Fluoride | BaF2 | 99.99% |
Calcium Fluoride | CaF2 | 99.99% |
Cerium fluoride | CeF3 | 99.9%,99.99% |
Erbium Fluoride | ErF3 | 99.99% |
Lanthanum fluoride | LaF3 | 99.99% |
Lead Fluoride | PbF2 | 99.99% |
Lithium Fluoride | LiF | 99.99% |
Magnesium Fluoride | MgF2 | 99.95% |
Nodium Fluoride | NaF | 99.99% |
Ytterbium Fluoride | YbF3 | 99.9% |
Yttrium Fluoride | YF3 | 99.9% |